In precision manufacturing fields such as semiconductors, FPD, wet etching, and chemical supply, leakage detection is a key link to ensure equipment safety, prevent process pollution, and reduce downtime losses.
For a long time, the mainstream solution in the market has been based on photoelectric leakage sensors, but photoelectric solutions are not omnipotent--Strong light environment and liquid coagulation two major pain points,Often lead to misjudgment or failure.To this end,Hua YifengAt the same time, the introduction of photoelectric type and capacitive type two products, the former standard mainstream, the latter is to complement the traditional scheme of natural short board.
01
The photoelectric sensor uses the scattering change of the light beam in the liquid to judge the leakage. When there is no leakage, the light beam of the light projection part is reflected to the light receiving part by the detection surface. When there is leakage, the light beam is scattered by the liquid and the light receiving part cannot receive the signal.
The advantage of this approach isFast response,Not affected by liquid conductivity,Pure water, acid and alkali liquid, organic solvent can be detected.
02
The emergence of capacitive sensors is to solve the failure problem of photoelectric type in the two scenarios of strong light and solidified liquid. It does not depend on light, nor does it depend on the fluidity or optical properties of the liquid, and the capacitive type came into being-it is not a substitute, but a complement.
Capacitive type by detecting the dielectric constant difference between the liquid and air to determine whether the leakage, no leakage, the medium between the electrodes is air (dielectric constant of 1).
Key advantages:Not affected by strong light: sunlight and lighting light are completely free of interference, and solidified liquid can be detected: even if the liquid has been crystallized, glued and solidified, the dielectric constant is still different from that of air, and the sensor can still output stably and adapt to more substrates: metal and non-metal base plates can be installed.
03
Leakage detection of semiconductor wafer wet etching process production line, etc.
FPD wet etching equipment leakage detection
FPD wet etching equipment leakage detection
FPD flat panel display industry glass cleaning equipment leakage detection
Li-ion industry photovoltaic silicon wafer cleaning equipment leakage detection
Selection Guide
If you are having a headache for leakage detection under complex working conditions, please try our capacitive scheme.
